Dutch chip equipment maker ASML said on September 14 that AI-driven demand has filled orders for its roughly US$200 million extreme ultraviolet (EUV) lithography systems through 2027, as chipmakers line up for new High NA tools and the company expands in Eindhoven.

Intel, the first company to adopt High NA, said the machines met throughput and reliability standards after processing more than 1 million wafers.

TSMC plans to use High NA from 2030. Samsung and SK Hynix have said they will start production with it in 2028.

ASML, the only commercial supplier of EUV lithography systems, has broken ground on new manufacturing facilities in the Eindhoven region that are expected to come online around 2026.

Shipments of ASML’s most advanced lithography systems to Chinese chip fabs remain constrained by Dutch and the US export rules, which the company has said it follows.

TSMC has separately said it was working with ASML to develop larger-mask technology for future leading-edge manufacturing.

🔗 Source: Reuters

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